Micro heater with Pt-Cr Thin Film Thermo-Couple for high speed biological measurements

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 21-23

  Gillot, F ^a   Arata, H F ^a   Morin, O ^a   Collard, D ^a   Fujita, H ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Chromium; Micro heater; Platinum; Thin film thermocouple

Indexed keywords

ACTUATORS; CHROMIUM; NUCLEIC ACIDS; ORGANIC ACIDS; OXIDE MINERALS; PLATINUM; QUARTZ; SENSORS; SPEED; THICK FILMS; THIN FILM DEVICES; THIN FILMS; TRANSDUCERS;

BIOLOGICAL MEASUREMENTS; HIGH SPEEDS; INTERNATIONAL CONFERENCES; MICRO DEVICES; MICRO HEATERS; MICRO-HEATER; SOLID-STATE SENSORS; TEMP ERATURE DETECTION; THIN FILM THERMOCOUPLE;

MICROSYSTEMS;

EID: 50049110297     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300062     Document Type: Conference Paper

References (2)

1. L. Shi and A. Majumdar, Recent developments in micro and nanoscale thermometry. Microscale Thermophysical Engineering, 2001. 5(4): p. 251-265.
2. K. Ishizuka, H. Arata, et al., Imaging of heat denaturation of single DNA molecules in femtoliter chambers on a micro heating device: toward a single-molecule detection of PCR, microTAS 2005, Boston, October 9-13, 2005, pp. 123-127.