Fabrication of reinforced nanoporous membranes

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 489-492

  Hoogerwerf, A C ^a   Hinderling, C ^b   Krishnamoorthy, S ^c   Hibert, C ^d   Spassov, V ^a   Overstolz, T ^a  

^a CSEM   (Switzerland)

^b Engineer School Wädenswil   (Switzerland)

^c FUJIREBIO INC   (Japan)

^d EPFL   (Switzerland)

Author keywords

Block copolymers; Mechanical design; Membranes; MEMS; MST; Nanotechnology

Indexed keywords

ACTUATORS; BLOCK COPOLYMERS; COLLOIDS; ELECTRON BEAM LITHOGRAPHY; ETCHING; MEMBRANES; MICROMACHINING; MICROSYSTEMS; NITRIDES; NONMETALS; OPTICAL DESIGN; POLYMERS; POLYSILICON; SENSORS; SILICON; SILICON NITRIDE; TECHNOLOGY; TRANSDUCERS;

DEEP-REACTIVE ION ETCHING; FABRICATION TECHNOLOGIES; INTERNATIONAL CONFERENCES; MECHANICAL DESIGN; MEMS; MICELLE FORMATION; MST; NANO-POROUS MEMBRANES; NANOTECHNOLOGY; SOLID-STATE SENSORS;

REACTIVE ION ETCHING;

EID: 50049107330     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300174     Document Type: Conference Paper

References (2)

1. S. Krishnamoorthy, R. Pugin, J. Brugger, H. Heinzelmann, A.C. Hoogerwerf, and C. Hinderling, "Block Copolymer Micelles as Switchable Templates for Nanofabrication", Langmuir, vol. 22, pp. 3450-3452, 2006.
2. S.K. Ghandi, "VLSI Fabrication Principles" John Wiley & Sons, 1983, p. 373.