Polymer surface morphology control for microfluidic devices

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 199-202

  Nabesawa, H ^a,b   Hitobo, T ^c   Wakabayashi, S ^d   Asaji, T ^c   Abe, T ^e   Nakatani, I ^f   Seki, M ^b  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b CHIBA UNIVERSITY   (Japan)

^c Tateyama Machine Co Ltd   (Japan)

^d Tateyama Kagaku Ind Co Ltd   (Japan)

^e TOHOKU UNIVERSITY   (Japan)

^f NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Microfluidic device; PMMA; Polymer; RIE; Surface morphology

Indexed keywords

ACTUATORS; CYCLOTRONS; ELECTRON CYCLOTRON RESONANCE; ETCHING; FLUIDIC DEVICES; GEOPHYSICAL PROSPECTING; MAGNETISM; MICROSYSTEMS; NANOFLUIDICS; POLYMERS; REACTIVE ION ETCHING; SENSORS; TRANSDUCERS;

ELECTRON CYCLOTRON RESONANCE (ECR); ETCHING CHARACTERISTICS; INTERNATIONAL CONFERENCES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC DEVICE; NOVEL METHODS; PMMA; POLYMER; POLYMER SURFACE MORPHOLOGY; RIE; SMOOTH SURFACES; SOLID-STATE SENSORS;

SURFACE MORPHOLOGY;

EID: 50049096734     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300105     Document Type: Conference Paper

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