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Volumn , Issue , 2007, Pages 3278-3281
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Micro Ion-Optical Systems Technology [MIST] for mass spectrometry using PCBMEMS
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Author keywords
[No Author keywords available]
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Indexed keywords
ATMOSPHERIC PRESSURE;
ATMOSPHERICS;
CONTROL SYSTEMS;
ELECTRONICS INDUSTRY;
EPITAXIAL GROWTH;
FLOW CONTROL;
HIGH PERFORMANCE LIQUID CHROMATOGRAPHY;
INDUSTRIAL ELECTRONICS;
ION SOURCES;
IONS;
MASS SPECTROMETRY;
METAL CLADDING;
OPTICAL INSTRUMENTS;
POLYMERIC GLASS;
TECHNICAL PRESENTATIONS;
TECHNOLOGY;
CONTROL NETWORKS;
ELECTRICAL FIELDS;
FLUID FLOW CONTROL;
FLUIDIC FLOW;
INTERNATIONAL SYMPOSIUM;
ION GENERATION;
ION-OPTICAL SYSTEMS;
MEMS MICROFABRICATION;
METALLIZATION;
NOVEL MATERIALS;
OPTICAL DEVICES;
PERFORMANCE CHARACTERISTICS;
POLYMERIC MATERIAL;
SOURCE DESIGNS;
VACUUM COMPATIBILITY;
OPTICAL SYSTEMS;
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EID: 50049092623
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ISIE.2007.4375140 Document Type: Conference Paper |
Times cited : (2)
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References (5)
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