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Volumn , Issue , 2007, Pages 2433-2436
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Micro fabrication of sic mesoscale lean direct injector array: Toward active combustion control
a
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Author keywords
Injectors; MEMS; Silicon carbide
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Indexed keywords
ACTIVE COMBUSTION CONTROL;
ACTIVE CONTROLS;
COMBUSTION INSTABILITIES;
COMBUSTION PROCESSES;
DEEP-REACTIVE ION ETCHING;
DIFFUSION-BONDING;
FABRICATION TECHNOLOGIES;
FIRST GENERATION;
FUEL INJECTORS;
FUEL SPRAYS;
GAS TURBINE ENGINES;
INJECTORS;
INTERNATIONAL CONFERENCES;
MESO-SCALE;
MICRO-ELECTRO MECHANICAL SYSTEMS;
MICRO-FABRICATION;
SIC SUBSTRATES;
SILICON CARBIDE (SIC);
SOLID-STATE SENSORS;
SPRAY PATTERNS;
SUBSTRATE MATERIALS;
ACTUATORS;
COMPOSITE MICROMECHANICS;
CONTROL SYSTEM ANALYSIS;
CONTROL THEORY;
DIESEL ENGINES;
ELECTRIC GENERATORS;
ELECTROMECHANICAL DEVICES;
ELECTRON BEAM LITHOGRAPHY;
FLUID MECHANICS;
GAS ENGINES;
GAS TURBINES;
INJECTION (OIL WELLS);
JET PUMPS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROSYSTEMS;
NONMETALS;
OPTICAL DESIGN;
PESTICIDES;
REACTIVE ION ETCHING;
REACTIVE MOLDING;
SENSORS;
SILICON;
SILICON CARBIDE;
SMOKE;
SPRAYING;
SUBSTRATES;
TECHNOLOGY;
THERMOCHEMISTRY;
TRANSDUCERS;
COMBUSTION;
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EID: 50049085148
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2007.4300662 Document Type: Conference Paper |
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Times cited : (7)
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References (3)
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