Manufacturing of microstructures with high aspect ratio by micromachining

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1525-1529

  Gietzelt, T ^a   Eichhorn, L ^a   Schubert, K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BUILDING MATERIALS; CLADDING (COATING); COMPOSITE MICROMECHANICS; ELECTRIC DISCHARGE MACHINING; FLUID MECHANICS; MACHINING; METAL RECOVERY; METALLIC COMPOUNDS; METALLURGY; METALS; MICROMACHINING; PHOTORESISTS; PRESSURE DROP;

COATING TECHNOLOGIES; END MILLS; HIGH ASPECT RATIO; HIGH ASPECT RATIOS; MACHINING PROCESSES; MATERIAL REMOVAL RATE; METALS AND ALLOYS; SMALL DIAMETER;

ASPECT RATIO;

EID: 49949115709     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0535-6     Document Type: Conference Paper

References (2)

1. Baier K, Lehndorff M, Katz A (2004) Mikroproduktion, No. 1, pp 27-29
2. Gietzelt T, Eichhorn L (2007) Galvanotechnik, Heft 6, pp 1504-1514