Sensitivity enhancement of laser absorption spectroscopy for atomic oxygen measurement in microwave air plasma

Vacuum

Volumn 83, Issue 1, 2008, Pages 21-24

  Matsui, Makoto ^a   Komurasaki, Kimiya ^a   Arakawa, Yoshihiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Air plasma; Atomic oxygen; High sensitive laser absorption spectroscopy; Microwave plasma

Indexed keywords

ABSORPTION; ATOMIC PHYSICS; ATOMIC SPECTROSCOPY; ATOMS; LASERS; MICROWAVES; NONMETALS; OXYGEN; PLASMA DIAGNOSTICS; PLASMAS; TIME MEASUREMENT;

AIR PLASMA; AIR PLASMAS; ATOMIC OXYGEN; DOWN TIME; HIGH SENSITIVE LASER ABSORPTION SPECTROSCOPY; LASER ABSORPTION SPECTROSCOPY; META-STABLE; MICROWAVE PLASMA; NUMBER DENSITIES; SENSITIVITY ENHANCEMENTS;

ABSORPTION SPECTROSCOPY;

EID: 49949114920     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.035     Document Type: Article

References (16)

1. Pardo C., Gonzalez-Aguilar J., Rodriguez-Yunta A., and Calderon M.A.G. J Phys D Appl Phys 32 (1999) 2181
2. Suzuki M., Komatsubara M., Umebayashi M., and Akatsuka H. J Nucl Sci Technol 34 (1997) 1159
3. Martinez H., Rodriguez-Lazcano Y., and Castillo F. Plasma Sources Sci Technol 16 (2007) 427
4. Auweter-Kurtz M. NATO research and technology organization proceedings; 2000. RTO-EN-8. p. 2A1-20.
5. Matsui M., Takayanagi H., Oda Y., Komurasaki K., and Arakawa Y. Vacuum 73 3-4 (2004) 341
6. Matsui M., Komurasaki K., Herdrich G., and Auweter-Kurtz M. AIAA J 43 (2005) 2060
7. Yamamoto Y., Yokota S., Matsui M., Komurasaki K., and Arakawa Y. Rev Sci Instrum 76 (2005) 083111
8. Inoue T., Matsui M., Takayanagi H., Komurasaki K., and Arakawa Y. Vacuum 80 (2006) 1174
9. Matsui M., Ogawa S., Komurasaki K., and Arakawa Y. J Appl Phys 100 (2006) 063102
10. Matsui M., Ikemoto T., Takayanagi H., Komurasaki K., and Arakawa Y. J Thermophys Heat Tr 21 (2007) 247
11. Paul J.B., Lapson L., and Anderson J.G. Appl Opt 40 (2001) 4904
12. Baer D.S., Paul J.B., Gupta M., and O'Keefe A. Appl Phys B 75 (2002) 261
13. Gupta M., Owano T., Baer D.S., and O'Keefe A. Chem Phys Lett 418 (2006) 11
14. O'Keefe A., and Deacon D.A.G. Rev Sci Instrum 59 (1988) 2544
15. Gianfrani L., Fox R.W., and Hollberg L. J Opt Soc Am B 16 (1999) 2247
16. Paldus B.A., and Kachanov A.A. Can J Phys 83 (2005) 975