Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1417-1422

  Kishihara, Mitsuyoshi ^a   Ukita, Yoshiaki ^b   Utsumi, Yuichi ^b   Ohta, Isao ^b  

^a OKAYAMA PREFECTURAL UNIVERSITY   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ETCHING; LASER BEAM CUTTING; MACHINING; MILLIMETER WAVES; OPTICAL DESIGN;

CONVENTIONAL MACHINING; DIFFICULT MATERIAL; EFFECTIVE MEDIUM; ELECTRICAL DISCHARGE MACHINING; HIGH-PRECISION; LASER CUTTINGS; LOW LOSSES; METALLIC WAVEGUIDES; MILLIMETER-WAVE COMPONENTS; SUB-MILLIMETER WAVES;

WAVEGUIDES;

EID: 49949111796     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0586-3     Document Type: Conference Paper

References (6)

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2. Forman MA (2006) Low-loss LIGA-fabricated coplanar waveguide and filter. Proc APMC2006 4:1905-1907
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5. Ukita Y, Kanda K, Matsui S, Utsumi Y (2006) Fabrication of PTFE microstructure using synchrotron radiation direct etching for microfluidics application. In: Proc. of EIPBN2006, pp 509-510
6. Zhang Y, Katoh T, Washio M, Yamada H, Hamada S (1995) High aspect ratio micromachining Teflon by direct exposure to synchrotron radiation. Appl Phys Lett 67:872-874