Design of an active linear guide by piezoelectric actuators

IECON Proceedings (Industrial Electronics Conference)

Volumn , Issue , 2007, Pages 2882-2885

  Chen, Cheng Wei ^a   Hsiao, Shih Wei ^a   Yao, Wu Sung ^a   Tsai, Mi Ching ^a   Chen, Tien Chi ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; ELECTRONICS INDUSTRY; INDUSTRIAL ELECTRONICS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; VIBRATIONS (MECHANICAL); VIBRATORS;

ANNUAL CONFERENCE; CREATIVE DESIGNS; VIBRATION MODES;

PIEZOELECTRIC ACTUATORS;

EID: 49949104144     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECON.2007.4459968     Document Type: Conference Paper

References (6)

1. Hiwin Technologies Corp.http://www.hiwin.com.tw/
2. T. Sashida and T. Kenjo, "An Introduction to Ultrasonic Motors". Oxford: Clarendon Press, 1993.
3. S. Ueha, Y. Tomikawa, M. Kurosawa, and N. Nakamura, "Ultrasonic Motors: Theory and Applications". Oxford: Clarendon Press, 1993
4. T. Muneishi and Y. Tomikawa, "Ultrasonic Linear Motor with Two Independent Vibration," Japanese Journal of Applied Physics, Vol. 43, pp. 6728-6732, 2004.
5. Y. Tomikawa, T. Takano, and H. Umeda, "Thin Rotary and Linear Ultrasonic Motors Using a Double-Mode Piezoelectric Vibrator of the First Longitudinal and Second Bending Modes," Japanese Journal of Applied Physics, Vol. 31, pp. 3073-3076, 1992.
6. C. K. Lim, S. He, I.M. Chen and S. H. Yeo "A Piezoelectric-on-Slider Type Linear Ultrasonic Motor for the Application of Positioning Stages", Proceedings of IEEE/ASME, pp. 103-108,1999