High aspect ratio glass structures produced by means of the drawing technology

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1541-1544

  Hesse, A ^a   Mrotzek, S ^a   Hulsenberg D ^a   Radlein E ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; GLASS; PHOTORESISTS;

GLASS STRUCTURES; HIGH ASPECT RATIO; PROCESS PARAMETERS;

TECHNOLOGY;

EID: 49949090827     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0562-y     Document Type: Conference Paper

References (3)

1. Belau S, Hülsenberg D, Mrotzek S, Harnisch A (2004) Fabrication of microstructured glass components by drawing technology. Actuator
2. Harnisch A (1998) Beitrag zur Entwicklung von Herstellungstechnologien für komplexe Bauteile aus mikrostrukturiertem Glas, Shaker
3. Hesse A, Mrotzek S, Belau S, Hülsenberg D (2005) Deutsche Glastechnische Gesellschaft, pp 41-42