Materials and processing issues for the manufacturing of integrated passive and active devices on flexible substrates

Proceedings of the Academic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX

Volumn , Issue , 2008, Pages

  Ravesi, S ^a,b   Alessandrino, S ^a,b   Bassi, A ^a,b   Cafta, B ^a,b   Camalleri, M ^a,b   Caristia, L ^a,b   Coffa, S ^a,b   Di Marco, S ^a,b   Di Stefano, M ^a,b   Fortunato, G ^a,c   Lo Verso, S ^a,b   Mangano, F ^a,b   Pecora, A ^a,c   Pignataro, B ^a   Privitera, V ^a,c   Scalese, S ^a,c   Scandurra, A ^a   Sparta, N ^a,b  

^a Plast ICs ^*

^b STMICROELECTRONICS   (Italy)

^c IMM

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE DEVICES; ACTIVE REGIONS; BUILDING BLOCKS; DEPOSITED THIN FILMS; FLEXIBLE ELECTRONICS; FLEXIBLE SUBSTRATES; FUNDAMENTAL PROPERTIES; HIGH-DENSITY; IN-VACUUM; INORGANIC FILMS; LASER PROCESSING; MICROSTRUCTURAL PROPERTIES; OPTICAL PATTERNING; PASSIVE DEVICES; PLASTIC FOILS; PLASTIC SUBSTRATES; POLY-SI; PRECISION RESISTORS; PROCESSING CONDITIONS; SMART SYSTEMS; TECHNOLOGICAL PLATFORMS; THIN FILMS DEPOSITION; VERY LOW TEMPERATURE;

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; DIELECTRIC PROPERTIES; ELECTRIC EQUIPMENT; ENERGY STORAGE; EXHIBITIONS; MATERIALS PROPERTIES; RESISTORS; SILICON; THICK FILMS; THIN FILM DEVICES; THIN FILMS; TRANSISTORS; VACUUM DEPOSITION;

PLASTICS;

EID: 49749135777     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FEDC.2008.4483874     Document Type: Conference Paper

References (1)

1. A. Scandurra, G. F. Indelli, B. Pignataro, S. Di Marco, M. A. Di Stefano, S. Ravesi and S. Pignataro, "Tantalum nitride thin film resistors by low temperature reactive sputtering for plastic electronics", presented at 12 European Conference on Applications of Surface and Interface Analysis, Brussel September 9-14, 2007