Characterization of photoconductive CdS thin films prepared on glass substrates for photoconductive-sensor applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 4, 2008, Pages 1334-1337

  Hur, Sung Gi ^a   Kim, Eui Tae ^a   Lee, Ji Hong ^a   Kim, Geun Hong ^b   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

^b Agency for Defence Development   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CADMIUM; CADMIUM COMPOUNDS; CRYSTAL RESONATORS; DATA STORAGE EQUIPMENT; ELECTRIC CONDUCTIVITY; GLASS; MAGNETRON SPUTTERING; PHOTOCONDUCTIVITY; SCALE (DEPOSITS); SEMICONDUCTING CADMIUM COMPOUNDS; SENSORS; SPUTTER DEPOSITION; SUBSTRATES; THICK FILMS; THIN FILMS;

CADMIUM SULFIDE; CDS FILMS; CDS THIN FILMS; GLASS SUBSTRATES; N-TYPE SEMICONDUCTORS; POLYCRYSTALLINE PHASES; RADIO-FREQUENCY MAGNETRON SPUTTERING; ROOM TEMPERATURES; SENSOR APPLICATIONS; SMOOTH SURFACES; WORKING PRESSURES;

FILM PREPARATION;

EID: 49749131995     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2945301     Document Type: Article

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