The fabrication of x-ray masks using proton beam writing

Journal of Micromechanics and Microengineering

Volumn 18, Issue 8, 2008, Pages

  Yue, Weisheng ^a   Chiam, Sher Yi ^a   Ren, Yaping ^a   Van Kan, Jeroen Anton ^a   Osipowicz, Thomas ^a   Jian, Linke ^a   Moser, Herbert O ^a   Watt, Frank ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; FABRICATION; GOLD; ION BEAM LITHOGRAPHY; MASKS; METALLIZING; OPTICAL DESIGN; PARTICLE BEAMS; PHOTORESISTS; PROTON BEAMS; PROTONS; X RAY LITHOGRAPHY;

ABSORBER PATTERN; CONVENTIONAL METHODS; DEEP X-RAY LITHOGRAPHY; FABRICATION METHODS; PROTON-BEAM WRITING; SIMPLIFIED METHOD; SOFT X-RAY; X-RAY MASKS;

X RAYS;

EID: 49749124203     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/8/085010     Document Type: Article

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