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Volumn 23, Issue 7, 2007, Pages 863-868
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A novel ATR FT-IR microspectroscopy technique for surface contamination analysis without interference of the substrate
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Author keywords
[No Author keywords available]
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Indexed keywords
COLLECTOR EFFICIENCY;
GERMANIUM METALLOGRAPHY;
NONDESTRUCTIVE EXAMINATION;
COLLECTING EFFICIENCY;
INFRARED OBJECTIVES;
MOLECULAR INFORMATION;
NONDESTRUCTIVE CHARACTERIZATION;
SOLID SUBSTRATES;
SURFACE CONTAMINANTS;
SURFACE CONTAMINATION ANALYSIS;
THIN ORGANIC FILMS;
CONTAMINATION;
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EID: 49749089325
PISSN: 09106340
EISSN: 13482246
Source Type: Journal
DOI: 10.2116/analsci.23.863 Document Type: Article |
Times cited : (19)
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References (8)
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