Erosion mechanisms of monocrystalline silicon under a microparticle laden air jet

Journal of Applied Physics

Volumn 104, Issue 3, 2008, Pages

  Li, Q L ^a,b   Wang, J ^a   Huang, C Z ^b  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b SHANDONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLE FRACTURE; FRACTURE; FRACTURE FIXATION; JETS; LITHOGRAPHY; MECHANISMS; METAL RECOVERY; NONMETALS; PETROLEUM DEPOSITS; PETROLEUM RESERVOIRS; SILICON; SOIL MECHANICS;

AIR JETS; CLEAVAGE FRACTURE; EROSION MECHANISMS; MATERIAL-REMOVAL PROCESSES; MICRO PARTICLES; MICRODENTS; MONOCRYSTALLINE SILICON; PRECISION PROCESSING; SILICON SUBSTRATES; SLIDING OR ROLLING; TARGET SURFACES; TWO TYPES;

EROSION;

EID: 49749084409     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2963362     Document Type: Article

References (16)

1. P. J. Slikkerveer, P. C. P. Bouten, and F. C. M. de Hass, Sens. Actuators, A 85, 296 (2000). 0250-6874
2. H. J. Ligthart, P. J. Slikkerveer, F. H. in't Veld, P. H. W. Swinkels, and M. H. Zonneveld, Philips J. Res. 50, 475 (1996). 0165-5817
3. B. R. Lawn, A. G. Evans, and D. B. Marshall, J. Am. Ceram. Soc. 0002-7820 10.1111/j.1151-2916.1980.tb10768.x 63, 574 (1980).
4. D. B. Marshall, B. R. Lawn, and A. G. Evans, J. Am. Ceram. Soc. 0002-7820 10.1111/j.1151-2916.1982.tb10782.x 65, 561 (1982).
5. D. B. Marshall, J. Am. Ceram. Soc. 67, 57 (1984). 0002-7820
6. M. Wakuda, Y. Yamauchi, and S. Kanzaki, J. Mater. Process. Technol. 132, 177 (2003). 0924-0136
7. M. Wakuda, Y. Yamauchi, and S. Kanzaki, Precis. Eng. 26, 193 (2002). 0141-6359
8. T. Nguyen, K. Pang, and J. Wang, Proceedings of the 11th International Symposium on Advances in Abrasive Technology (ISAAT2008) (Hyogo, Japan, 2008).
9. I. M. Hutchings, Tribology: Friction and Wear of Engineering Materials (Edward Arnold, London, 1992).
10. P. H. Shipway and I. M. Hutching, Wear 149, 85 (1991). 0043-1648
11. I. M. Hutchings, Powder Technol. 76, 3 (1993). 0032-5910
12. F. Ebrahimi and L. Kalwani, Mater. Sci. Eng., A 0921-5093 10.1016/S0921-5093(99)00077-5 268, 116 (1999).
13. A. A. Griffith, Philos. Trans. R. Soc. London 0962-8428 10.1098/rsta.1921.0006 221, 163 (1921).
14. R. Perez and P. Gumbsch, Acta Mater. 1359-6454 10.1016/S1359-6454(00) 00238-X 48, 4517 (2000).
15. A. George and G. Michot, Mater. Sci. Eng., A 0921-5093 10.1016/0921-5093(93)90649-Y 164, 118 (1993).
16. G. Michot, Surf. Sci. 186, L561 (1987). 0039-6028