|
Volumn 130, Issue 8, 2008, Pages 24-28
|
MEMS: Lessons for nano
|
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 49549118957
PISSN: 00256501
EISSN: None
Source Type: Trade Journal
DOI: 10.1115/1.2008-aug-1 Document Type: Article |
Times cited : (2)
|
References (0)
|