Effect of titanium dioxide (TiO2) seed layer on the phase composition of 0.7Pb (Mg1/3Nb2/3)O3-0.3PbTiO3 film prepared by pulsed laser deposition

Microelectronic Engineering

Volumn 85, Issue 9, 2008, Pages 1920-1923

  Wang, J M ^a   Li, W L ^a   Liu, C Q ^a   Fei, W D ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Perovskite phase; PMN PT film; Remnant polarization; TiO2 seed layer

Indexed keywords

LIGHT METALS; MAGNESIUM; NIOBIUM COMPOUNDS; THICK FILMS; TITANIUM; TITANIUM DIOXIDE;

LEAD MAGNESIUM NIOBATE-LEAD TITANATE; PEROVSKITE PHASE; PMN-PT FILM; REMNANT POLARIZATION; THIN FILMS; TIO2 SEED LAYER;

TITANIUM PLATING;

EID: 49549088794     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.06.013     Document Type: Article

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