EBIC targeting for dual beam FIB based TEM sample preparation

Microscopy and Microanalysis

Volumn 14, Issue SUPPL. 2, 2008, Pages 392-393

  Presser, N ^a   Foran, B ^a   Sin, Y ^a   Mason, M ^a   Moss, S C ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 49549083266     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927608083712     Document Type: Conference Paper

References (5)

1. For a thorough and lucid review of the physics of EBIC and like techniques see 1a. H.J. Leamy, J. Applied Physics, 53, (1982), 851
2. 1b. D. B. Holt, "The Conductive Mode" in SEM Microcharacterization of Semiconductors, D.B. Holt and D. C. Joy eds. Academic Press, London 1989
3. P. Petroff and R. L. Hartman, Applied Phy. Lett., 23 (1973), 469
4. B. Foran, N. Presser, Y. Sin and S.C. Moss, 792CD, Proceedings Microscopy and Microanalysis 2007, Fort Lauderdale, Florida, Aug 7-9, 2007
5. This work was supported under the Aerospace Corporation's Independent Research and Development Program.