Formation of nanocavities in dielectrics: Influence of equation of state

Applied Physics A: Materials Science and Processing

Volumn 92, Issue 4, 2008, Pages 837-841

  Hallo, L ^a   Bourgeade, A ^b   Mezel C ^a   Travaille G ^a   Hebert D ^b   Chimier, B ^a   Schurtz, G ^a   Tikhonchuk, V T ^a  

^a CENTRE LASERS INTENSES ET APPLICATIONS   (France)

^b CEA CESTA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; LASER PULSES; PLASMA DEPOSITION; PULSED LASER APPLICATIONS;

CAVITY FORMATION; CAVITY SIZES; CONFINED GEOMETRIES; EQUATION OF STATE; HEAT OF SUBLIMATION; MICRO-EXPLOSION; NANO-CAVITIES; NUMERICAL SIMULATIONS; PICOSECOND LASER PULSES; PLASMA FORMATIONS; SUB MICRONS; TIGHT FOCUSING;

EQUATIONS OF STATE;

EID: 49449102601     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4580-5     Document Type: Article

References (7)

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