Enhancement of the dielectric permittivity of Ta2O5 ceramics by CO2 laser irradiation

Applied Physics Letters

Volumn 85, Issue 9, 2004, Pages 1577-1579

  Ji, Lingfei ^a   Jiang, Yijian ^a   Wang, Wei ^a   Yu, Zhenlong ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON DIOXIDE; CRYSTALLOGRAPHY; DIELECTRIC LOSSES; LASER BEAM EFFECTS; LASER BEAMS; MATHEMATICAL MODELS; MICROELECTRONICS; MICROSTRUCTURE; PERMITTIVITY; PHASE TRANSITIONS; SCANNING; SPUTTERING; TANTALUM COMPOUNDS;

CERAMIC WAFERS; DIFFRACTION PATTERNS; IRRADIATION TIME; POWER DENSITY;

CERAMIC MATERIALS;

EID: 4944265075     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1784539     Document Type: Article

References (12)

1. M. Hiratani, S. Kimura, T. Hamada, S. Iijima, and N. Nakanishi, Appl. Phys. Lett. 81, 2433 (2002).
2. R. Guo, Y. Jiang, and A. S. Bhalla, Mater. Lett. 57, 270 (2002).
3. E. Atanassova and D. Spasov, Microelectron. Reliab. 42, 1171 (2002).
4. R. F. Cava, W. F. Peck Jr, and J. J. Krajewski, Nature (London) 377, 215 (1995).
5. M. Okutomi, M. Kasamatu, K. Tsukamoto, S. Shiratori, and F. Uchiyama, Appl. Phys. Lett. 44, 1132 (1984).
6. Z. Scares Macedo, A. C. Hernandes, Mater. Lett. 55, 217 (2002).
7. T. Kasai, Y. Ozaki, H. Noda, K. Kawasaki, and K. Tanemoto, J. Am. Ceram. Soc. 72, 1716 (1989).
8. I. Rychetsky, J. Petzelt, and T. Ostapchuk, Protoplasma 81, 4224 (2002).
9. N. C. Stephenson and R. S. Roth, Acta Crystallogr., Sect. B: Struct. Crystallogr. Cryst. Chem. B27, 1037 (1971).
10. N. C. Stephenson and R. S. Roth, J. Solid State Chem. 3, 145 (1971).
11. Y. Jiang, R. Guo, and A. S. Bhalla, Appl. Laser 22, 244 (2002).
12. A. S. Pavlovic, J. Chem. Phys. 40, 951 (1964).