Rapid flash patterning of nanostructures

Applied Physics Letters

Volumn 85, Issue 10, 2004, Pages 1793-1795

  Yoon, Hyunsik ^a   Lee, Kyoung Mi ^a   Khang, Dahl Young ^a   Lee, Hong H ^a   Choi, Se Jin ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHROMIUM; COOLING; ELECTRON BEAM LITHOGRAPHY; HEATING; INFRARED LAMPS; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; POLYETHYLENE TEREPHTHALATES; POLYVINYL ALCOHOLS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; VISCOSITY;

FILM THICKNESS; POLYMER FILMS; RAPID FLASH PATTERNING (RFP) METHOD; SUBSTRATE SURFACES;

NANOSTRUCTURED MATERIALS;

EID: 4944247296     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1790588     Document Type: Article

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