P-μc-Si1-xGex:H thin film by VHF-PECVD

Optoelectronics Letters

Volumn 4, Issue 2, 2008, Pages 130-132

  Shang, Ze Ren ^a   Zhang, Jian Jun ^a   Zhang, Li Ping ^a   Hu, Zeng Xin ^a   Xue, Jun Ming ^a   Zhao, Ying ^a   Geng, Xin Hua ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; BORON COMPOUNDS; GERMANIUM; NONMETALS; SILICON;

BORON DOPING; HYDROGENATED SILICON;

MICROCRYSTALLINE SILICON;

EID: 49249089220     PISSN: 16731905     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11801-008-7137-0     Document Type: Article

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