A multilayer MEMS platform for single-cell electric impedance spectroscopy and electrochemical analysis

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 850-862

  Dittami, Gregory M ^a   Ayliffe, Edward ^b   King, Curtis S ^b   Rabbitt, Richard D ^a  

^a Department of Electrical and Computer Engineering   (United States)

^b E I Spectra   (United States)

Author keywords

Electrochemical analysis; Extracellular voltage patterning; Impedance spectroscopy; Multilayered microelectromechanical system (MEMS); Neurotransmitter detection; Singlecell analysis

Indexed keywords

BIOELECTRIC PHENOMENA; BIOLOGICAL ORGANS; CELL MEMBRANES; CELLS; COMPOSITE MICROMECHANICS; CYCLIC VOLTAMMETRY; CYTOLOGY; DIELECTRIC PROPERTIES; ELECTRIC IMPEDANCE; ELECTRIC IMPEDANCE MEASUREMENT; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTROLYSIS; ELECTROMECHANICAL DEVICES; MAMMALS; MEMS; METALLIZING; MICROCHANNELS; MICROELECTROMECHANICAL DEVICES; NANOFLUIDICS; OPTICAL DESIGN; POTASSIUM; VOLTAMMETRY;

BIOLOGICAL CELLS; CELL MANIPULATIONS; CHEMICAL SENSING; ELECTRICAL INTERFACING; ELECTRICAL STIMULATIONS; ELECTROCHEMICAL ANALYSIS; ELECTROCHEMICAL STUDIES; ELECTRODE ARRAYS; EXTRACELLULAR VOLTAGE PATTERNING; FABRICATION TECHNIQUES; HEAT-SEALING; IMPEDANCE SPECTROSCOPIES; IMPEDANCE SPECTROSCOPY; LIVING CELLS; MAMMALIAN INNER EAR; MEMS DEVICES; MEMS PLATFORM; MICRO CHAMBERS; MICRO DOMAINS; MICRO FLUIDIC SYSTEMS; MICRO-ELECTRO- MECHANICAL SYSTEM; MICRO-MOLDING; MULTI LAYERING; MULTI-LAYERED; MULTILAYERED MICROELECTROMECHANICAL SYSTEM (MEMS); NEUROTRANSMITTER DETECTION; OUTER HAIR CELLS; POTASSIUM FERRICYANIDE; SENSORY HAIR CELLS; SINGLECELL ANALYSIS; SPACE AND TIME; TIME-DEPENDENT;

ELECTRIC NETWORK ANALYSIS;

EID: 49249085968     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.921726     Document Type: Article

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