Annealing effects on the structural properties of IrO2 thin films

Vacuum

Volumn 82, Issue 12, 2008, Pages 1400-1403

  Kim, Hyoun Woo ^a   Shim, Seung Hyun ^a   Myung, Ju Hyun ^a   Lee, Chongmu ^a  

^a Inha University   (South Korea)

Author keywords

IrO2; Structural properties; Thermal annealing

Indexed keywords

IRIDIUM; IRIDIUM COMPOUNDS;

ANNEALING EFFECTS; IRIDIUM OXIDE; IRO2; MORPHOLOGICAL CHANGES; STRUCTURAL PROPERTIES; THERMAL ANNEALING;

ANNEALING;

EID: 49149117987     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.004     Document Type: Article

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