A miniature effusion cell for the vacuum deposition of organic solids with low vapor pressures in surface science studies

Review of Scientific Instruments

Volumn 79, Issue 7, 2008, Pages

  Yoshinobu, Jun ^a   Mukai, Kozo ^a   Katayama, Tetsuo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CELLS; COOLING; CYTOLOGY; HYDROSTATIC PRESSURE; OPTICAL DESIGN; ULTRAHIGH VACUUM; VACUUM; VACUUM TECHNOLOGY; VAPOR PRESSURE; VAPORS;

HEAT CAPACITIES; LOW VAPOR PRESSURES; ORGANIC SOLIDS; RAPID HEATING; SURFACE SCIENCE STUDIES; UHV CHAMBERS;

VACUUM DEPOSITION;

EID: 49149109145     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2960562     Document Type: Article

References (9)

1. K. Yase, N. Takada, and N. Tanigaki, Oyo Butsuri 70, 455 (2001).
2. J. T. Yates, Experimental Innovations in Surface Science: A Guide to Practical Laboratory Methods and Instruments (AIP, New York, 1997).
3. Organic deposition cell (KOD-Cell), Kitano Seiki Co., Ltd., Japan, see http://www.kitano-seiki.co.jp/product/cell/KOD-cell.html for its specifications.
4. Organic material effusion cell (OME), MBE-Komponenten GmbH, Germany., see http://www.mbe-components.com/products/effusion/ome.html for its specifications.
5. T. Castro and R. Reifenberger, Rev. Sci. Instrum. 58, 289 (1987).
6. N. Sato, K. Seki, and H. Inokuchi, Rev. Sci. Instrum. 58, 1112 (1987).
7. Polyimide tube, Furukawa Electric, Japan. The information of the polyimide tubes is available on the web (http://www.furukawa.co.jp/poly/english/ index.htm), but the details of chemical composition are not disclosed. Therefore we should be very careful about impurities. After ultrasonic cleaning a tube with acetone, we checked the degassing from a polyimide tube under experimental conditions in UHV using a quadrupole mass spectrometer. After degassing the tube cell at 200 °C, the operation at 120 °C did not show any desorption of troublesome chemicals.
8. Polyimide insulated K -type (chromel-alumel) thermocouple wires, Goodfellow, England.
9. Glass-Ceramic UHV inline connector (Part No. 100871), Accu-Glass Products, San Fernando, CA, USA, see http://accuglassproducts.com/home.php for its specifications.