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Volumn 474, Issue 1-2, 2008, Pages 12-15
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Thermal analysis and vapour pressure of a new series of tungsten(VI) oxo-alkoxide-β-ketoesterate complex precursors for the chemical vapour deposition of tungsten oxide
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Author keywords
Ketoesterate complexes; Chemical vapour deposition; Langmuir equation; Thermogravimetry; Tungsten oxide; Vapour pressure
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Indexed keywords
CHEMICAL ANALYSIS;
CHEMICAL VAPOR DEPOSITION;
FUNCTION EVALUATION;
GRAVIMETRIC ANALYSIS;
INFRARED SPECTROSCOPY;
NUCLEAR MAGNETIC RESONANCE;
NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY;
OXIDE FILMS;
OXIDES;
PRESSURE;
THERMOANALYSIS;
THERMOGRAVIMETRIC ANALYSIS;
THICK FILMS;
TUNGSTEN;
VAPOR PRESSURE;
VEGETATION;
ALKOXIDE;
CHEMICAL VAPOUR DEPOSITION;
COMPLEX PRECURSORS;
ELSEVIER (CO);
FUNCTION OF TIME;
INFRARED (IR);
LANGMUIR EQUATIONS;
NEW SERIES;
NMR SPECTROS COPY;
TUNGSTEN COMPLEXES;
TUNGSTEN OXIDE (WO);
TUNGSTEN OXIDE THIN FILMS;
VAPOUR PRESSURES;
TUNGSTEN COMPOUNDS;
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EID: 48949115317
PISSN: 00406031
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tca.2008.04.018 Document Type: Article |
Times cited : (9)
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References (11)
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