Topography measurements for determining the decay factors in surface replication

Measurement Science and Technology

Volumn 19, Issue 8, 2008, Pages

  Song, J ^a   Rubert, P ^b   Zheng, A ^a   Vorburger, T V ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Acru Works   (United Kingdom)

Author keywords

Decay factor; Electro forming; Standard casing; Surface metrology; Topography measurement

Indexed keywords

DECAY (ORGANIC); TOPOGRAPHY;

CROSS-CORRELATION FUNCTION; DECAY FACTOR; MEASUREMENT TRACEABILITY; NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY; STANDARD CASING; STANDARD REFERENCE MATERIAL; SURFACE METROLOGY; TOPOGRAPHY MEASUREMENT;

SURFACE TOPOGRAPHY;

EID: 48849095027     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/8/084005     Document Type: Article

References (12)

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