Shape optimization of micromachined biosensing cantilevers

Proceedings of Technical Papers - 2007 International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT

Volumn , Issue , 2007, Pages 301-304

  Chen, Kun Nan ^a   Yu, Sun Po ^a  

^a TUNGNAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; MICROSYSTEMS; MOLECULAR INTERACTIONS; PHOTORESISTS; TECHNOLOGY;

ANALYTES; BASIC SHAPES; BIO-SENSING; CROSS SECTIONING; FREQUENCY SENSITIVITY; MASS CHANGES; MASS VARIATIONS; MICRO CANTILEVERS; MICROMACHINED; MICROMACHINED CANTILEVERS; NUMERICAL EXAMPLES; OBJECTIVE FUNCTIONS; OPTIMUM SHAPE; SENSING AREAS; SHAPED BEAMS; SINGLE BEAMS;

SHAPE OPTIMIZATION;

EID: 48649084002     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMPACT.2007.4433622     Document Type: Conference Paper

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