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Volumn 320, Issue 1-2, 2008, Pages 173-178
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Comparing flat and micro-patterned surfaces: Gas permeation and tensile stress measurements
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Author keywords
Gas permeability; Membrane; Micro patterning; Simulations; Tensile stress
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Indexed keywords
BEAMS AND GIRDERS;
CARBON DIOXIDE;
FINITE ELEMENT METHOD;
HELIUM;
INERT GASES;
INSTRUMENTS;
MEMBRANES;
MICROMACHINING;
MOLECULAR BEAM EPITAXY;
NITROGEN;
NONMETALS;
OXYGEN;
PERMEATION;
POLYMERS;
STRESS MEASUREMENT;
STRESSES;
TENSILE STRESS;
FINITE ELEMENT (FE) SIMULATIONS;
FLAT MEMBRANES;
GAS FLUXING;
GAS PERMEATION;
MECHANICAL STRENGTHS;
MICRO PATTERNED SURFACES;
MICRO PATTERNING;
MICRO-PATTERNING;
GAS PERMEABLE MEMBRANES;
CARBON DIOXIDE;
HELIUM;
NITROGEN;
OXYGEN;
ARTICLE;
DIFFUSION;
GAS PERMEABILITY;
GAS TRANSPORT;
GEOMETRY;
MECHANICAL STRESS;
MEMBRANE PERMEABILITY;
MEMBRANE STRUCTURE;
PRIORITY JOURNAL;
SIMULATION;
SURFACE PROPERTY;
TENSILE STRESS;
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EID: 48549102242
PISSN: 03767388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.memsci.2008.03.052 Document Type: Article |
Times cited : (30)
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References (12)
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