Technological methods for low temperature microfluidic devices microfabrication

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2007, Pages 107-110

  Coraci, A ^a   Podaru, Cecilia ^a   Manea, Elena ^a   Iancu, E ^a   Ciuciumis, Alina ^a   Popescu, Alina ^a   Corici, O ^b  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b SCHLUMBERGER   (United States)

Author keywords

Low temperature; Microchannels; Microfabrication; Microfluidics

Indexed keywords

FLUIDIC DEVICES; INTEGRATED CIRCUITS; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; TEMPERATURE; THERMAL MANAGEMENT (ELECTRONICS);

BIOLOGICAL APPLICATIONS; LOW TEMPERATURES; MICRO-FLUIDIC DEVICES; RECTANGULAR CHANNEL; SACRIFICIAL LAYER; SEMI-CIRCULAR CHANNELS; TECHNOLOGICAL METHODS; TECHNOLOGICAL PROCESS;

MICROFLUIDICS;

EID: 48549097713     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2007.4519658     Document Type: Conference Paper

References (11)

1. C. Ashby, C. Matzke & all, Sandia National Laboratories, MRS Bulletin, 25(8); Aug., CA, USA,. 2000.
2. Y. Joo, K. Dieu, and Chang-Jin Kim, Mechanical, Aerospace and Nuclear Engineering Dept., Univ. of California, L. A., IEEE 0-7803-2503-6, pp. 362-367, 1995.
3. R. J. Weber, U.S. Patent #5,057,908, 1991;
4. A. B. Frazier and M. G. Allen, Proc. Of Micro Electro Mechanical Systems Workshop, pp. 87-92, Feb., Travemunde, Germany, 1992.
5. M. E. Henstock and E. S. Spencer-Timms, Trans. Institute of Metal Finishing, 40, pp. 179-185, 1963.
6. A. Brenner, Proc. Amer. Electroplaters' Soc, 28, pp. 28-35, 1941.
7. A. Coraci, C. Podaru, E. Manea, A. Ciuciumis, and O. Corici, IEEE International Semiconductor Conference, Proceeding CAS 2005, 1, 3-5 octomber 2005.
8. Ki Bang Lee and Liwei Lin, DARPA Project, Berkley Sensor and Actuator Center, Dept. of Mech. Engineering, Univ. of California at Berkley, C. A., U.S.A.
9. D. B. Tuckerman and R. F. Pease, IEEE Electron Devices Letters, EDL-2, pp. 126-129, 1981.
10. D. B. Tuckerman, Ph. D. Dissertation, Stanford University, 1984.
11. A. Coraci & all, Two alternative technological methods for microchannels microfabrication, IEEE Int. Semiconductor Conf., Proceeding CAS 2006.