Capacitive sensor integrated in silicon cavity for microfluidic jet systems

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 2, Issue , 2007, Pages 465-468

  Van Der Velden, M ^a   Spronck, J W ^a   Schmidt, R H Munnig ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MICROFLUIDICS; NOZZLES; PRECISION ENGINEERING; SILICON; SILICON WAFERS; SPRAY NOZZLES;

ALUMINUM PARTS; CAPACITANCE CHANGE; DROPLET FORMATION; GROUNDED SUBSTRATES; MEASURED VALUES; SILICON CAVITY; SILICON MICROMACHINING; VERTICAL ELECTRODES;

CAPACITIVE SENSORS;

EID: 48349137997     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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