A multi-parameter platform for gas sensing using semiconducting metal oxide films

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 1225-1228

  Zhong, Guixiong ^a   Bernhardt, George ^a   Lad, Robert ^a   Collins, Scott ^a   Smith, Rosemary ^a  

^a UNIVERSITY OF MAINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CHARGE COUPLED DEVICES; CHEMICAL REACTIONS; CHEMICAL SENSORS; ELECTRIC CURRENTS; GAS DETECTORS; GAS ENGINEERING; GAS SENSING ELECTRODES; GASES; METALLIC COMPOUNDS; METALS; MOS DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTOR MATERIALS; SENSORS; TECHNOLOGY;

CHEMIRESISTOR; GAS SENSING; GAS SENSORS; METAL OXIDES; METAL-OXIDE FILMS; METAL-OXIDE-SEMICONDUCTOR; MULTI PARAMETERS; OXIDIZING GASES; REDUCTION REACTIONS; SENSOR PLATFORMS; WORK FUNCTIONS;

OXIDE FILMS;

EID: 48349128217     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388630     Document Type: Conference Paper

References (7)

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