On-chip monopole antennas using pre-deformed cantilevers

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

Volumn , Issue , 2007, Pages 2309-2312

  Kim, Jeong Il ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 48349124367     PISSN: 15223965     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APS.2007.4395993     Document Type: Conference Paper

References (10)

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10. W. Fang and J. A. Wickert, "Determining mean and gradient residual stresses in thin films using micromachined cantilevers," J. Micromcech. Microeng., vol. 6, pp. 301-309, Sep. 1996.