Fabrication and characterization of three-dimensional ZrO2 -toughened Al2O3 ceramic microdevices

International Journal of Applied Ceramic Technology

Volumn 5, Issue 4, 2008, Pages 353-359

  Chen, Weiwu ^a   Kirihara, Soshu ^a   Miyamoto, Yoshinari ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL DESIGN; THREE DIMENSIONAL;

MICRO-DEVICES; THREE DIMENSIONAL (3D);

ZIRCONIUM ALLOYS;

EID: 48349110786     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2008.02211.x     Document Type: Article

References (16)

1. H. Fujita, "Future of Actuators and Microsystems," Sens. Actuators A, 56 105-111 (1996).
2. L. G. Griffith and G. Naughton, "Tissue Engineering-Current Challenges and Expanding Opportunities," Science, 295 1009-1014 (2002).
3. S. John, "Strong Localization of Photons in Certain Disordered Dielectric Superlattices," Phys. Rev. Lett., 58 2486-2489 (1987).
4. J. D. Joannopoulos, P. R. Villeneuve, and S. Fan, "Photonic Crystals: Putting a New Twist on Light," Nature, 386 143-149 (1997).
5. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and J. Bur, "A Three-Dimensional Photonic Crystal Operating at Infrared Wavelengths," Nature, 394 251-253 (1998).
6. A. Birner, R. B. Wehrspohn, U. M. Gösele, and K. Busch, "Silicon-Based Photonic Crystals," Adv. Mater., 13 377-388 (2001).
7. J. Lee, C. Kim, Y. Kim, K. Ho, K. Constant, and C. Oh, "Three-Dimensional Metallic Photonic Crystals Fabricated by Soft Lithography for Midinfrared Applications," Appl. Phys. Lett., 88 181112 (2006).
8. H. Sirringhaus, T. Kawase, R. H. Friend, T. Shimoda, M. Inbasekaran, W. Wu, and E. P. Woo, "High-Resolution Inkjet Printing of All-Polymer Transistor Circuits," Science, 290 2123-2126 (2000).
9. M. L. Griffith and J. W. Halloran, "Freeform Fabrication of Ceramics Via Stereolithography," J. Am. Ceram. Soc., 79 2601-2608 (1996).
10. C. Hinczewski, S. Corbel, and T. Chartier, "Ceramic Suspensions Suitable for Stereolithography," J. Eur. Ceram. Soc., 18 583-590 (1998).
11. 2 Particles and Their Terahertz Wave Properties," J. Am. Ceram. Soc., 90 92-96 (2007).
12. C. Sun, N. Fang, D. M. Wu, and X. Zhang, "Projection Micro-Stereolithography Using Digital Micro-Mirror Dynamic Mask," Sens. Actuators A, 121 113-120 (2005).
13. X. Zhang, X. N. Jiang, and C. Sun, "Micro-Stereolithography of Polymeric and Ceramic Microstructures," Sens Actuators, 77 149-156 (1999).
14. G. R. Anstis, P. Chantikul, B. R. Lawn, and D. B. Marshall, "A Critical Evaluation of Indentation Techniques for Measuring Fracture Toughness: I. Direct Crack Measurements," J. Am. Ceram. Soc., 64 533-538 (1981).
15. T. Aoki, M. W. Takeda, J. W. Haus, Z. Yuan, M. Tani, K. Sakai, N. Kawai, and K. Inoue, "Terahertz Time-Domain Study of a Pseudo-Simple-Cubic Photonic Lattice," Phys. Rev. B, 64 046106 (2001).
16. M. C. C. S. E. B. Moraes, C. N. Elias, J. Duailibi Filho, and L. G. Oliveira, "Mechanical Properties of Alumina-Zirconia Composites for Ceramic Abutments," Mater. Res., 7 643-649 (2004).