|
Volumn , Issue , 2004, Pages 492-493
|
Apparatus for measuring the cylindricity of calculable cross-capacitor electrodes
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CAPACITANCE;
CAPACITANCE MEASUREMENT;
MODULATION;
MODULATORS;
CAPACITANCE PROBES;
CAPACITOR ELECTRODES;
CYLINDRICITY;
NOVEL TECHNIQUES;
PRECISE MEASUREMENTS;
SIGMA-DELTA MODULATIONS;
DELTA SIGMA MODULATION;
|
EID: 48349104473
PISSN: 05891485
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/CPEM.2004.305327 Document Type: Conference Paper |
Times cited : (5)
|
References (1)
|