Comparison of FDTD excitation models for scatterometry of periodic reticles

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

Volumn , Issue , 2007, Pages 1673-1676

  Salski, B ^a   Gwarek, W K ^b   Celuch, M ^b  

^a QWED SP Z O O   (Poland)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA ACCESSORIES; ANTENNAS; CHLORINE COMPOUNDS; COMMUNICATION CHANNELS (INFORMATION THEORY); CRACK PROPAGATION; ELASTIC WAVES; ELECTRIC NETWORK ANALYSIS; FINITE DIFFERENCE TIME DOMAIN METHOD; MECHANISMS; MICROWAVE ANTENNAS; MICROWAVE CIRCUITS; MICROWAVE DEVICES; PARAMETER EXTRACTION; SCATTERING PARAMETERS;

APPLICATIONS.; CIRCUIT ANALYSIS; EXCITATION MODELS; FDTD ALGORITHMS; FDTD GRIDS; FREQUENCY DOMAINS; INTERNATIONAL SYMPOSIUM; PERIODIC WAVEGUIDING STRUCTURES; PLANE WAVE ILLUMINATION; PROPAGATING PLANE; RIGOROUS COUPLED-WAVE ANALYSIS; S PARAMETERS; SCATTEROMETRY; WAVEGUIDE MODES;

PERIODIC STRUCTURES;

EID: 48349086180     PISSN: 15223965     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APS.2007.4395834     Document Type: Conference Paper

References (10)

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