Detection of atoms in weakly ionised oxygen plasma along a closed tube

Strojarstvo

Volumn 48, Issue 1-2, 2006, Pages 17-22

  Drenik, Aleksander ^a   Cvelbar, Uroš ^a   Vesel, Alenka ^a   Mozetič, Miran ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Atom density; Closed tube; Density; Measuring of Ionised oxygen plasma; Plasma

Indexed keywords

ATOMIC PHYSICS; FIBER OPTICS; METALS; NICKEL; NONMETALS; OXYGEN; PLASMAS; TUBES (COMPONENTS); WALLS (STRUCTURAL PARTITIONS);

ATOM DENSITY; FIBER OPTIC CATALYTIC PROBES; LINEAR FUNCTIONS; OXYGEN PLASMAS; RADIO FREQUENCY (RF); RECOMBINATION COEFFICIENTS;

ATOMS;

EID: 48249135645     PISSN: 05621887     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (4)

1. KRSTULOVIĆ, N; LABAZAN, I.; MILOŠEVIĆ, S.; CVELBAR, U.; VESEL, A.; MOZETIČ, M.: Optical Emission Spectra of RF Oxygen Plasma, Material] in tehnologije 38 (2004) 1-2, 51-54.
2. ŠORLI, I.; ROČAK, R.: Determination of Atomic Oxygen Density with a Nickel Catalytic Probe, Journal of Vacuum Science & Technology A 18 (2000) 2, 338-342.
3. BABIČ, D.; POBERAJ, I.; MOZETIČ, M.: Fiber Optic Catalytic Probe for Weakly Ionized Oxygen Plasma Characterization, Review of Scientific Instruments 72 (2001) 11, 4110-4114.
4. BABIČ, D.; POBERAJ, I.; MOZETIČ, M.: Comparison of Fiber Optics and Standard Nickel Catalytic Probes for Determination of Neutral Oxygen Atoms Concentration, Journal of Vacuum Science & Technology A 20 (2002) 1.