High speed fabrication of aluminum nanostructures with 10 nm spatial resolution by electrochemical replication

Nanotechnology

Volumn 19, Issue 35, 2008, Pages

  Biring, Sajal ^a,b   Tsai, Kun Tong ^b   Sur, Ujjal Kumar ^b   Wang, Yuh Lin ^b,c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; COPPER PLATING; ELECTRON BEAM LITHOGRAPHY; LIGHT METALS; LITHIUM; NANOFLUIDICS; NANOSTRUCTURES; OPTICAL DESIGN; SILICON; THROUGHPUT;

AL FOIL; ALUMINUM CHLORIDE (PAC); ANODIC ALUMINA (AAO); CHEMICAL PRE TREATMENT; ELECTROCHEMICAL REPLICATION (ECPR); HIGH FIDELITY; HIGH SPEEDS; HIGH THROUGHPUT TECHNIQUE; HYDRIDE BATH; LATERAL RESOLUTIONS; LITHIUM ALUMINUM HYDRIDE; LONG RANGE; NANO CHANNELS; NON-AQUEOUS; RAPID FABRICATION; ROOM-TEMPERATURE (RT); SI(0 0 1) SURFACE; SPATIAL RESOLUTION (SR);

ALUMINUM;

ALUMINUM; ALUMINUM CHLORIDE; ALUMINUM DERIVATIVE; ALUMINUM LITHIUM HYDRIDE; ALUMINUM OXIDE; LITHIUM DERIVATIVE; NANOMATERIAL; ORGANIC COMPOUND;

ARTICLE; ELECTROCHEMICAL ANALYSIS; ELECTROCHEMISTRY; NANOCHEMISTRY; NANOFABRICATION; PRIORITY JOURNAL;

EID: 48249123193     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/35/355302     Document Type: Article

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