|
Volumn , Issue , 2007, Pages 515-518
|
Fabrication and assembly of a monolithic 3D CMUT array for imaging applications
|
Author keywords
CMUT; Internal imaging; IVUS; Ultrasound
|
Indexed keywords
DIELECTRIC FILMS;
IMAGE SEGMENTATION;
IMAGING TECHNIQUES;
LITHOGRAPHY;
MEDICAL IMAGING;
MICROMACHINING;
MONOLITHIC INTEGRATED CIRCUITS;
NONMETALS;
OPTICAL DESIGN;
PAINTING;
POLYSILICON;
PRISMS;
SILICON;
THREE DIMENSIONAL;
ULTRASONIC IMAGING;
ULTRASONIC TRANSDUCERS;
ULTRASONICS;
ARRAY PLATES;
ASSEMBLY PROCESSING;
BEAM-FORMING;
BEFORE AND AFTER;
BONDING WIRES;
CMUT;
COMPREHENSIVE INFORMATION;
DEEP SILICON ETCHING;
ELECTRICAL INTERCONNECTS;
FLIP CHIPPING;
IMAGING APPLICATIONS;
INTERNAL IMAGING;
IVUS;
MECHANICAL LINKAGES;
MICROMACHINED;
MONOLITHICALLY INTEGRATED;
MULTI-DIRECTIONAL;
NOVEL ARCHITECTURE;
SILICON SUBSTRATES;
SURFACE MICROMACHINING PROCESSES;
ULTRASOUND;
IMAGE SENSORS;
|
EID: 48149108564
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ULTSYM.2007.136 Document Type: Conference Paper |
Times cited : (8)
|
References (3)
|