Trench-isolated CMUT arrays with a supporting frame: Characterization and imaging results

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 507-510

  Zhuang, Xuefeng ^a   Wygant, Ira O ^a   Lin, Der Song ^a   Kupnik, Mario ^a   Oralkan, Ömer ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

CMUT; Supporting frame; Through wafer trench isolated interconnect; Volumetric imaging

Indexed keywords

2-D ARRAY; ARRAY ELEMENTS; CMUT; COLLAPSE MODES; CONDUCTIVE SILICON; ELECTRICAL CONTACTS; FLIP-CHIP-BONDING; FRAME STRUCTURES; IMMERSION TESTING; MECHANICAL SUPPORTS; OPERATING FREQUENCIES; PULL-IN; RECTANGULAR MEMBRANES; SILICON-ON-INSULATOR WAFERS; SUPPORTING FRAME; THROUGH-WAFER TRENCH-ISOLATED INTERCONNECT; VOLUMETRIC IMAGING; WAFER FUSION;

ELECTRONICS INDUSTRY; FLIP CHIP DEVICES; INTEGRATED CIRCUITS; NONMETALS; OPTICAL DESIGN; SILICON; SILICON WAFERS; ULTRASONIC TRANSDUCERS; ULTRASONICS;

WAFER BONDING;

EID: 48149099587     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.134     Document Type: Conference Paper

References (5)

1. X. Zhuang, D.-S. Lin, A. S. Ergun, O. Oralkan, and B. T. Khuri-Yakub, "Trench-isolated CMUT arrays with a supporting frame," in IEEE Ultrasonics Symposium, 3-6 Oct. 2006, Vancouver, BC, Canada, 2006, pp. 1955-1958.
2. X. Zhuang, D.-S. Lin, M. Kupnik, and B. T. Khuri-Yakub, "Characterization of CMUTs with Three Modes of Operation," submitted to IEEE Trans. Ultrason., Ferroelect., Freq. Contr.
3. A. Nikoozadeh, B. Bayram, G. G. Yaralioglu, and B. T. Khuri-Yakub, "Analytical calculation of collapse voltage of CMUT membrane," in IEEE Ultrasonics Symposium, 2004, pp. 256-259 Vol.1.
4. B. J. Kirchmayer, W. A. Moussa, and M. D. Checkel, "Finite element modeling of a capacitive micromachined ultrasonic transducer," in Proceedings of International Conference on MEMS, NANO and Smart Systems, 2003, pp. 405-410.
5. I. O. Wygant, X. Zhuang, D. T. Yeh, O. Oralkan, A. S. Ergun, M. Karaman, and B. T. Khuri-Yakub, "Integration of 2D CMUT Arrays with Front-End Electronics for Volumetric Ultrasound Imaging," accepted for publication by IEEE Trans. Ultrason., Ferroelectr., Freq. Control.