2X size and cost reduction of Film Bulk Acoustic Resonator (FBAR) chips with tungsten electrodes for PCS/GPS/800 MHz multiplexers

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1144-1147

  Bradley, P ^a   Kim, J ^b   Ye, S ^b   Nikkel, P ^b   Bader, S ^b   Feng, C ^b  

^a BROADCOM CORPORATION   (United States)

^b NONE

Author keywords

FBAR; Handsets; Multiplexers; Piezoelectric; RF filters; Tungsten

Indexed keywords

DIE SIZE; DUPLEXERS; EFFECTIVE COUPLING; ELECTRODE MATERIALS; FBAR; FILM BULK ACOUSTIC RESONATOR; FILM BULK ACOUSTIC RESONATOR FILTERS; HANDSETS; MULTIPLEXERS; PIEZOELECTRIC; RF FILTERS; TUNGSTEN ELECTRODES;

ACOUSTIC EQUIPMENT; ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTICS; COST REDUCTION; COSTS; ELECTRODES; FINANCE; INDUSTRIAL ECONOMICS; METALLIZING; RESONATORS; SEMICONDUCTOR MATERIALS; TUNGSTEN; ULTRASONICS;

ACOUSTIC IMPEDANCE;

EID: 48149087933     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.289     Document Type: Conference Paper

References (4)

1. K. M. Lakin, J. Belsick, J.F. McDonald, and K. T. MeCarron, "Improved bulk wave resonator coupling coefficient for wide bandwidth filters," Proc. 2001 IEEE Ultrasonics Symposium, pp. 827-831, Oct. 2001.
2. P. Bradley, R. Ruby, B. Yu, K. Grannen, "A 3.8 mm × 3.8 mm × 1.37 mm hermetic FBAR duplexer for 800 MHz handsets with wafer-scale packaging," Proc. 2004 IEEE Ultrasonics Symposium, pp. 1694-1697, Oct. 2004.
3. P. Bradley, J. Kim, S. Ye, B. Yu, K. Grannen, D. Lee, D. Hula, and W.K. Kim, "A 6-port Film Bulk Acoustic Resonator (FBAR) multiplexer for U.S. CDMA handsets permitting use of PCS, cellband, and GPS with a single antenna," Proc. 2006 IEEE Ultrasonics Symposium, Oct. 2006.
4. J.D. Larson III, P. Bradley, S. Wartenberg, R. Ruby, "Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system," Proc. 2000 IEEE Ultrasonics Symposium, pp. 863-866, Oct. 2000.