Temperature compensated bulk acoustic wave resonator and its predictive ID acoustic tool for RF filtering

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1243-1246

  Petit, D ^a,b   Abele, N ^a   Volatier, A ^a   Lefevre, A ^c   Ancey, P ^a   Carpentier, J F ^a  

^a STMioroeleotronios   (France)

^b UNIVERSITÉ DE LYON   (France)

^c CEA LETI   (France)

Author keywords

1D mason thermal model; BAW (Bulk Acoustic Wave); SMR (Solidly Mounted Resonator); TCF (Temperature Coefficient of Frequency)

Indexed keywords

1D MASON THERMAL MODEL; BAW (BULK ACOUSTIC WAVE); BULK ACOUSTIC WAVE; QUALITY FACTOR; RF FILTERING; SIGNIFICANT REDUCTION; SMR (SOLIDLY MOUNTED RESONATOR); TCF (TEMPERATURE COEFFICIENT OF FREQUENCY); TEMPERATURE COEFFICIENT OF FREQUENCY; THERMAL EFFECTS; THERMAL MODELLING;

ACOUSTIC WAVES; ELASTIC WAVES; ELECTRIC CURRENTS; SILICON COMPOUNDS; THERMOGRAPHY (TEMPERATURE MEASUREMENT); ULTRASONICS;

ACOUSTICS;

EID: 48149087750     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.312     Document Type: Conference Paper

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