A study on manufacturing of LCD prism sheets through silicon anisotropic etching

Journal of Korean Institute of Metals and Materials

Volumn 46, Issue 6, 2008, Pages 377-381

  Jeon, Kwangseok ^a   Ryoo, Kunkul ^a  

^a Soonchunhyang University   (South Korea)

Author keywords

Cross pattern; Fast H C injection molding; Ni stamp; Prism sheets; Si aniotropic etching; Transmissivity; Zigzag patterns

Indexed keywords

EID: 48049109189     PISSN: 17388228     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. K. Ryoo, W. Kim, Y. Kim, M. Lee and Y. Lee and Y. Lee, J. Kor Inst. Inst, net & Mater. 43, 142 (2005)
2. G. S. Jeong, J. S. Park and Y. G. Choi, J. Elec. Elec. Mat. 10, 481 (1997).
3. Y. Linden, L. Tennerz, J. Tirenn, and B. Hok, Sensors Actuator. 16, 67 (1989).
4. K. Petersen, Proc. IEEE. 70, 420 (1982).
5. J. Bryzek, Sensors Actuator. 56, 1 (2004).
6. H. R. Kim, Y. D. Kim, K. I. Kim, W. C. Je-ung and D. S. Kim, RIST. 18, 3 (2004).
7. V. B. Svetovoy, J. W. Berenschot and M. C. Elwenspoek, Appl. Phys. Lett. 60, 995 (1992).
8. G. S. Chung, Microelectronic Engineering 85, 271 (2007).
9. K. Sato, Sensors and Actuators, 64, 87 (1988).
10. K. Petersen, Proc. IEEE. 70, 420 (1982).