Optimal sensor configuring techniques for the compensation of thermo-elastic deformations in high-precision systems

Collection of Papers Presented at The 13th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC

Volumn , Issue , 2007, Pages 208-213

  Koevoets, A H ^a   Eggink, H J ^a   Van Der Sanden, J ^a   Dekkers, J ^a   Ruijl, T A M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; INDUSTRIAL MANAGEMENT; SENSORS; TEMPERATURE MEASUREMENT; THERMOELASTICITY; UNCERTAINTY ANALYSIS;

COMPENSATION METHODS; ELASTIC PROPERTIES; HIGH-PRECISION; MODAL REDUCTION TECHNIQUE; MODEL BASED; OPTIMAL SENSOR PLACEMENTS; OPTIMAL SENSORS; POSITIONING ACCURACIES; SENSOR CONFIGURATIONS; THERMAL BEHAVIOUR; TIME VARYING; TIME-DEPENDENT;

ERROR COMPENSATION;

EID: 48049094175     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/THERMINIC.2007.4451779     Document Type: Conference Paper

References (4)

1. T.A.M. Ruijl, 'Ultra Precision Coordinate Measuring Machine', Ph.D. Thesis, TU-Delft, 2001.
2. R.W. Freund, Reduced-Order Modeling Techniques Based on Krylov subspaces and Their Use in Circuit Simulation, Numerical analysis Manuscript, 98-3-02, 1998
3. I.M. Elfadel and David D. Ling, A Block Rational Arnoldi Algorithm for Passive Model-Order Reduction of Multiport RLC Networks. Proc. ICCAD, 1997.
4. S.Vokwein. Proper Orthogonal Decomposition and Singular Value Decomposition. SFB-Preprint No 153, 1999.