Fabrication of mos-compatible ion-sensitive devices for water pollution monitoring (warmer)

Proceedings of the 14th International Conference "Mixed Design of Integrated Circuits and Systems", MIXDES 2007

Volumn , Issue , 2007, Pages 477-481

  Zaborowski, Michał ^a   Jaroszewicz, Bogdan ^a   Tomaszewski, Daniel ^a   Prokaryn, Piotr ^a   Malinowska, Elzbieta ^b   Grygołowicz Pawlak, Ewa ^b   Grabiec, Piotr ^a  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Ion sensor; ISFET; Microelectronic technology; Potentiometric electrode

Indexed keywords

IN-LINE; INTERNATIONAL CONFERENCES; ION SENSOR; ISFET; ISFET PH SENSORS; MANUFACTURING PROCESSES; MICROELECTRONIC TECHNOLOGY; POLLUTION MONITORING; POTENTIOMETRIC ELECTRODE; POTENTIOMETRIC RESPONSES; SENSOR FABRICATION PROCESSES; SERIES RESISTANCE; SI SUBSTRATES;

AUTOMATION; CLADDING (COATING); ELECTRONICS INDUSTRY; EPITAXIAL GROWTH; INDUSTRIAL ENGINEERING; INTEGRATED CIRCUITS; MOS DEVICES; OIL SPILLS; OPTICAL DESIGN; PAPER COATING; POLLUTION; RUNOFF; SENSORS; SILICON;

WATER POLLUTION;

EID: 47749149277     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIXDES.2007.4286208     Document Type: Conference Paper

References (2)

1. th Conf. Informatics for Environmental Protection, Brno Sept. 7-9, 2005
2. B. Jaroszewicz et al. "Technology and Measurements of Backside Contacted ISFETs" Mixdes 2002, Wroclaw 20-22 June, 2002 p.139