Development of Nissin new boron cluster ion implanter

Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007

Volumn , Issue , 2007, Pages 125-126

  Hamamoto, Nariaki ^a   Umisedo, Sei ^a   Koga, Yuji ^a   Matsumoto, Takao ^a   Nagayama, Tsutomu ^a   Tanjyo, Masayasu ^a   Nagai, Nobuo ^a   Horsky, Tom ^b   Jacobson, Dale ^b   Glavish, Hilton ^b  

^a NISSIN ION EQUIPMENT CO LTD   (Japan)

^b Ceradyne Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 47649120082     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IWJT.2007.4279964     Document Type: Conference Paper

References (6)

1. T. Aoyama et al., IWJT(2005) p28
2. M. Ishibashi et al., IWJT(2005) p31
3. T. N. Horsky et al., IIT(2006) p198
4. D. Adams et al., IIT(2006) p178
5. H. F. Glavish et al., IIT(2006) p167
6. N. Hamamoto et al., IIT(2004) p95