Carbon buildup monitoring using RBS: Correlation with secondary electrons

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 244, Issue 2, 2006, Pages 427-435

  Aguilera, E F ^a,b   Rosales, P ^a   Martinez Quiroz, E ^a   Murillo, G ^a,b   Fernandez M C ^a  

^a INSTITUTO NACIONAL DE INVESTIGACIONES NUCLEARES   (Mexico)

^b UNIVERSIDAD AUTÓNOMA DEL ESTADO DE MÉXICO   (Mexico)

Author keywords

Carbon buildup; Rutherford backscattering; Secondary electrons

Indexed keywords

BEAM CURRENTS; CARBON BUILDUP; RUTHERFORD BACKSCATTERING; SECONDARY ELECTRONS;

CARBON; ELECTRON BEAMS; ELECTRON EMISSION; IONS; METAL FOIL;

ELECTRON TRANSITIONS;

EID: 47649093886     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.10.019     Document Type: Article

References (33)

1. L. Quaglia, G. Robaye, M. Cuypers, and J.N. Barrandon Nucl. Instr. and Meth. 68 1969 315
2. E.H. Hirsch J. Phys. D: Appl. Phys. 10 1977 2069
3. G. Blondiaux, M. Valladon, L. Quaglia, G. Robaye, G. Weber, and J.L. Debrun Nucl. Instr. and Meth. 227 1984 19
4. M.J.F. Healy Nucl. Instr. and Meth. B 129 1997 130
5. J.J. Kolata, R.M. Freeman, F. Hass, B. Heusch, and A. Gallmann Phys. Rev. C 21 1980 579
6. K.A. Erb, R.R. Bets, S.K. Korotky, M.M. Hindi, P.P. Tung, M.W. Sachis, S.J. Willett, and D.A. Bromley Phys. Rev. C 22 1980 507
7. K.U. Kettner, H. Lorenz-Wirzba, and C. Rolfs Z. Phys. A 298 1980 65
8. H.W. Becker, K.U. Kettner, C. Rolfs, and H.P. Trautvetter Z. Phys. A 303 1981 305
9. L.J. Satkowiak, P.A. DeYoung, J.J. Kolata, and M.A. Xapsos Phys. Rev. C 26 1982 2027
10. J.R. Patterson, H. Winkler, and C.S. Zaidnis Astrophys. J. 157 1969 367
11. M.G. Mazarakis, and W.E. Stephens Phys. Rev. C 7 1973 1280
12. B. Dasmahapatra, B. Cujec, and F. Lahlou Nucl. Phys. A 384 1982 257
13. B. Maurel, G. Amsel, and J.P. Nadai Nucl. Instr. and Meth. 197 1982 1
14. N.J. Chou, T.H. Zabel, J. Kim, and J.J. Ritsko Nucl. Instr. and Meth. B 45 1990 86
15. Y. Lifshitz, S.R. Kasi, and J.W. Rabalais Phys. Rev. Lett. 62 1989 1290
16. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, and W. Eckstein Phys. Rev. Lett. 41 1990 10468
17. Y. Lifshitz, C.D. Roux, K. Boyd, W. Eckstein, and J.W. Rabalais Nucl. Instr. and Meth. B 83 1993 351
18. S. Yastrebov, and R. Smith Nucl. Instr. and Meth. B 180 2001 145
19. J.F. Hanlon A User's Guide to Vacuum Technology third ed. 2003 Wiley New York
20. K.M. Poole Proc. Phys. Soc. B 66 1953 541
21. E.F. Aguilera Rev. Mex. Fis. 43 1997 600
22. P. Rosales, E.F. Aguilera, E. Martinez-Quiroz, G. Murillo, R. Policroniades, A. Varela, E. Moreno, M. Fernández, H. Berdejo, J. Aspiazu, D. Lizcano, H. García-Martínez, A. Gómez Camacho, E. Chávez, M.E. Ortiz, A. Huerta, and R. Macías Rev. Mex. Fis. 49 2003 88
23. E.F. Aguilera, P. Rosales, E. Martinez-Quiroz, G. Murillo, M.C. Fernández, H. Berdejo, D. Lizcano, A. Gómez-Camacho, R. Policroniades, A. Varela, E. Moreno, E. Chávez, M.E. Ortíz, A. Huerta, T. Belyaeva, M. Wiescher, Phys. Rev. C, in preparation.
24. E.F. Aguilera, P. Rosales, and F.J. Ramírez-Jiménez Trans. Nucl. Sci. 52 2005 10.1109/TNS.2005.856754
25. W.-K. Chu, J.W. Mayer, and M.-A. Nicolet Backscattering Spectrometry 1978 Academic Press New York
26. M. Mayer, SIMNRA User's Guide, Report IPP 9/113, 1997, Max-Planck-Institut fur Plasmaphysik, Garching, Germany.
27. E.F. Aguilera, E. Martinez-Quiroz, H.M. Berdejo, and M.C. Fernández Rev. Mex. Fís. 41 1995 507
28. J.F. Ziegler, J.P. Biersack, and U. Littmark The Stopping and Range of Ions in Solids 1985 Pergamon Press New York
29. C.C. Dednam, S. Froneman, D.W. Mingay, and J. Van Waart Nucl. Instr. and Meth. B 24/25 1987 366
30. A. Clouvas, C. Potiriadis, H. Rothard, D. Hofmann, R. Wunsch, K.O. Groeneveld, A. Katsanos, and A.C. Xenoulis Phys. Rev. B 55 1997 12086
31. R.A. Baragiola Nucl. Instr. and Meth. B 78 1993 223
32. H. Ohno, J.A. van den Berg, S. Nagai, and D.G. Armour Nucl. Instr. and Meth. B 148 1999 673
33. P. Patsalas, and S. Logothetidis Nucl. Instr. and Meth. B 178 2001 247