Study of arsenic doping ZnO thin films grown by metal-organic chemical vapor deposition via x-ray photoelectron spectroscopy

Journal of Physics Condensed Matter

Volumn 20, Issue 29, 2008, Pages

  Guan, Hesong ^a   Xia, Xiaochuan ^a   Zhang, Yuantao ^a   Gao, Fubin ^a   Li, Wancheng ^a   Wu, Guoguang ^a   Li, Xiangping ^a   Du, Guotong ^a,b  

^a JILIN UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; ARSENIC COMPOUNDS; CORUNDUM; FILM GROWTH; GALLIUM ALLOYS; INDUSTRIAL CHEMICALS; ION BEAM ASSISTED DEPOSITION; METALLIZING; METALS; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; NITROGEN; NONMETALS; ORGANIC CHEMICALS; ORGANIC COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; SEMICONDUCTING GALLIUM; SEMICONDUCTING ZINC COMPOUNDS; SPUTTER DEPOSITION; THICK FILMS; VAPOR DEPOSITION; VAPORS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC ALLOYS; ZINC OXIDE;

ARSENIC DOPING; METAL-ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD); SAPPHIRE SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY (XPS); ZNO THIN FILMS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 47249124030     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/20/29/292202     Document Type: Conference Paper

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