Precise MEMS gyroscope with ladder structure

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2529-2532

  Mochida, Yoichi ^a   Kato, Yoshitaka ^a   Konaka, Yoshihiro ^a   Mori, Akira ^a   Kobayashi, Masato ^a   Kobayashi, Shinji ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

Acceleration sensitivity; Gyroscope; Temperature dependence

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; GYROSCOPES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; OPTICAL DESIGN; SENSORS; TRANSDUCERS;

ACCELERATION SENSITIVITY; CAR NAVIGATION SYSTEMS; DRIVING MODES; GYROSCOPE; HIGH-PRECISION; INTERNATIONAL CONFERENCES; LADDER STRUCTURES; MEMS GYROSCOPES; OFFSET DRIFT; SENSOR MODULES; SOLID-STATE SENSORS; STABLE CHARACTERISTICS; TEMPERATURE CHANGING; TEMPERATURE DEPENDENCE; TEMPERATURE DEPENDENCES;

PHOTORESISTS;

EID: 47249121955     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300686     Document Type: Conference Paper

References (7)

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