Fabrication of an antireflective polymer optical film with subwavelength structures using a roll-to-roll micro-replication process

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Ting, Chia Jen ^a,b   Chang, Fuh Yu ^b   Chen, Chi Feng ^c   Chou, C P ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ELECTROPLATING; FABRICATION; FINITE DIFFERENCE METHOD; FINITE DIFFERENCE TIME DOMAIN METHOD; LITHOGRAPHY; METALLIZING; MOLDS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NICKEL; NICKEL ALLOYS; NUMERICAL ANALYSIS; OPTICAL DESIGN; OPTICAL MATERIALS; PHOTONICS; PLASMA ETCHING; POLYMER FILMS; POLYMERS; REACTIVE ION ETCHING; SELF ASSEMBLY; THERMOPLASTICS;

ANTI ADHESION; ANTIREFLECTION (AR); CYLINDER ARRAYS; DEEP ULTRA VIOLET (DUV); FEATURE SIZES; FINITE DIFFERENCE TIME DOMAIN (FDTD-3D); FLEXIBLE DEVICES; NANO STRUCTURING; NANO-PHOTONICS; OPTICAL (PET) (OPET); OPTICAL QUALITIES; POLYETHYLENE TEREPHTHALATE (PET); REPLICATION PROCESSES; ROLL TO ROLL PROCESSING; ROLL-TO-ROLL; SELF-ASSEMBLY; SINGLE LAYERS; SPECTRAL RANGES; STRUCTURE FABRICATION; SUB-WAVELENGTH STRUCTURE; VISIBLE LIGHT SPECTRUM;

OPTICAL FILMS;

EID: 47249100143     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075001     Document Type: Article

References (38)

1. Kanamori Y, Ishimori M and Hane K 2002 IEEE Photon. Technol. Lett. 14 1064-6
2. Ishimori M, Kanamori Y, Sasaki M and Hane K 2003 Japan. J. Appl. Phys. 41 4346-9
3. Kanamori Y, Kobayashi K, Yugami H and Hane K 2003 Japan. J. Appl. Phys. 42 4020-3
4. Heine C and Morf R H 1995 Appl. Opt. 34 2476-82
5. Gombert A et al 1998 Sol. Energy Mater. Sol. Cells 54 333-42
6. Gombert A et al 2004 Opt. Eng. 43 2525
7. Boerner V, Abbott S, Bläsi B, Gombert A and HoBfeld W 2003 SID 03 Dig. pp 68-71
8. Kanamori Y, Kikuta H and Hane K 2000 Japan. J. Appl. Phys. 39 L735-7
9. Kintaka K, Nishii J, Mizutani A, Kikuta H and Nakano H 2001 Opt. Lett. 26 1642-4
10. Bernhard C G 1967 Endeavour 26 79-84
11. Gaylord T K, Baird W E and Moharam M G 1986 Appl. Opt. 25 209-14
12. Motamedi M E, Southwell W H and Gunning W J 1992 Appl. Opt. 31 225-9
13. Lalanne P and Morris G M 1997 Nanotechnology 8 53-6
14. Kanamori Y, Sasaki M and Hane K 1999 Opt. Lett. 24 1422-4
15. MacLeod A 2001 Thin-Film Optical Filters 3rd edn (Bristol: Institute of Physics Publishing)
16. Willey R 2002 Practical Design and Production of Thin Films (New York: Dekker)
17. Lalanne P and Morris G M 1996 Proc. SPIE 2776 300-9
18. Sinzinger S and Jahns J Microoptics 2nd edn (Weinheim: Wiley-VCH)
19. Gale M T et al 2005 Opt. Lasers Eng. 43 373-86
20. Heckele M and Schomburg W K 2004 J. Micromech. Microeng. 14 R1-14
21. Wadle S, Wuest D, Cantalupo J and Lakes R S 1994 Opt. Eng. 31 213-8
22. Oppliger Y, Sixt P, Stauffer J M, Mayor J M, Regnault P and Voirin G 1994 Microelectron. Eng. 23 449-54
23. Swanson G J and Weldkamp W B 1987 High-efficiency, multi-level, diffractive optical elements US Patent 4895790
24. Weck M, Fischer S and Vos M 1997 Nanotechnology 8 145-48
25. Hanemann T, Heckele M and Piotter V 2000 Polym. News 25 224-9
26. Heckele M, Bacher W and Müller K D 1998 Microsyst. Technol. 4 122-4
27. Yang J J, Chen C F and Liao Y S 2008 Opt. Commun. 28 474-9
28. Dreuth H and Heiden C 1999 Sensors Actuators A 78 198-204
29. Schnieper M, Di Prima F, Zschokke C, Gale M T and David C 2003 Fabrication and application of subwavelength gratings Proc. Int. Conf. on Diffractive Optics DO 2003 (Oxford, UK, Sep.) pp 16-22
30. Izu M and Ellison T 2003 Solar Energy Mater. Solar Cells 78 613-26
31. Gale M T 2003 Opt. Photon. News 14 24-9
32. Jain K, Klosner M, Zemel M and Raghunandan S 2005 Proc. IEEE 93 1500-10
33. Bowden N, Brittain S, Evans A G, Hutchinson J W and Whitesides G M 1998 Nature 393 146-9
34. Tan H, Gilbertson A and Chou S Y 1998 J. Vac. Sci. Technol. B 16 3926-8
35. Mäkelä T, Haatainen T, Majander P and Ahopelto J 2007 Microelectron. Eng. 84 877-9
36. Mäkelä T, Haatainen T, Majander P and Ahopelto J 2005 Trends in Nanotechnology 2005 (TNT 2005) (Oviedo, Spain, 29 Aug.-02 Sep.)
37. Guo L J 2007 Adv. Mater. 19 495-513
38. Berenger J P 1996 IEEE Trans. Antennas Propag. 44 110-7